3 Heads Compact desktop magnetron sputtering coater
three head 2" RF Plasma magnetron sputtering coater designed for non-metallic thin film coating, mainly for multilayer oxide thin films. It is the most cost-effective coater for researching in the new generation of oxide thin films. DC magnetron sputtering option is available upon request for metallic film deposition, enabling three DC, one RF / two DC, and two RF / one DC sputtering head configurations.
Product Description
Introducing the 3 Heads Compact desktop magnetron sputtering coater, a versatile solution designed for non-metallic thin film coating, with a primary focus on multilayer oxide thin films. This coater offers an economical option for research in the new generation of oxide thin films. Its flexibility is enhanced with the availability of a DC magnetron sputtering option for metallic film deposition. This enables various sputtering head configurations, including three DC, one RF / two DC, and two RF / one DC.
Operating on single-phase 110 VAC at 50/60 Hz with a total power consumption of 1000 W (inclusive of the vacuum pump and water chiller), the coater features three 2" magnetron sputtering heads, each equipped with water cooling jackets and quick clamps for easy installation within the quartz chamber. A manually operated shutter on the flange and a 10 L/min digitally controlled recirculating water chiller ensure effective sputtering head cooling.
The vacuum chamber, constructed from stainless steel with dimensions of 300 mm OD x 500 mm Height, incorporates an aluminum sealing flange with a high-temperature silicone O-ring. A stainless steel shield cage provides 100% RF radiation shielding. Achieving a maximum vacuum level of 1.0E-5 Torr, the coater offers the option to enhance performance further with a turbo pump and chamber baking.
The sample holder is a rotatable and heatable stage made of ceramic with a stainless steel cover, accommodating samples up to 2" wafers. The rotation speed is adjustable from 1 to 10 rpm for uniform coating, and the holder's temperature is precisely controlled via a digital temperature controller, ranging from room temperature to a maximum of 600°C with an accuracy of +/- 1.0°C.
Featuring a KF40 vacuum port for connecting to a vacuum pump, the coater achieves a vacuum level of 1.0E-2 Torr with the included dual-stage mechanical pump and 1.0E-3 Torr with an optional turbo pump. With dimensions of 540 mm L x 540 mm W x 1000 mm H and a packing weight of approximately 145 kg, it comes with a one-year limited warranty and lifetime support. Customization options are available to meet specific requirements.
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