1500℃ single heating zone low vacuum CVD system with 3-channel mass flowmeter O1500-60IT-3Z-LV
1500℃ single heating zone low vacuum CVD system is equipped with three-channel mass flowmeter, which has high precision and high reliability. It can accurately mix 1~3 channels of gas. The operation panel adopts digital display, which is intuitive and efficient. If you have special needs, you can contact the technician to customize any number of gas channels.
Product Description
The 1500℃ single heating zone low vacuum CVD system, denoted by the model O1500-60IT, stands out as a meticulously engineered apparatus tailored for precise applications. Comprising a 1500℃ single temperature zone tube furnace, a three-channel mass flowmeter, and a double stage rotary vane vacuum pump, this system delivers advanced capabilities in materials processing and experimentation.
The tube furnace, governed by a precision temperature control instrument for PID temperature control, allows users to edit a 30-segment temperature rise and fall program, incorporating protective features against overheating and short circuits. Operating through a high-definition true color touch screen, the furnace ensures user-friendly interaction, making it accessible even to non-professionals after minimal training.
Constructed with a high-purity alumina furnace tube and an integrated design, the system guarantees stability and safety at temperatures reaching 1500℃. The heating element, a high-quality silicon carbon rod, achieves a maximum temperature of 1500℃. For those requiring higher temperatures, a customized silicon molybdenum rod heating element can be configured to reach 1700℃. This versatile CVD system finds applications in high-temperature sintering, metal annealing, quality inspection, and CVD experiments requiring diverse gas mixing atmospheres, making it ideal for use in universities, research institutes, and industrial settings.
The vacuum tube furnace, characterized by a model O1500-60IT, features a high-purity alumina tube with diameter options and a length of 1000mm. The furnace chamber extends for 400mm, with a heating zone of 300mm and an additional 150mm for the constant temperature zone. Operating efficiently at temperatures up to 1450℃, the system maintains a temperature control accuracy of ±1℃ through a 30 or 50 segment program temperature control mode displayed on an LCD screen. Achieving a vacuum level of 4.4E-3Pa, the system is powered by AC 220V at 50/60Hz.
The gas supply system, Model 3Z, features a 3-channel configuration with gas mass flowmeters for H2, N2, and Ar gases, offering precise flow measurements. Constructed from 304 stainless steel, including needle valves, the gas channel employs 1/4" ferrule connectors for gas inlet and outlet. The exhaust system utilizes a mechanical pump with a pumping rate of 1.1L/S and an exhaust interface with KF16 fitting. Vacuum measurement relies on a resistance gauge, achieving an ultimate vacuum as low as 1.0E-1Pa, powered by an AC 220V supply at 50/60Hz. This comprehensive technical setup ensures the reliable and precise operation of the 1500℃ single heating zone low vacuum CVD system.
Disclaimer: The information presented on this website, including product images, product descriptions, and technical parameters, serves as a reference guide. Please note that due to potential delays in updates, discrepancies may exist between the content displayed here and the current product status. We encourage you to reach out to our dedicated sales team to verify the most up-to-date details. It is important to understand that the information provided on this site does not constitute a formal offer or commitment, and our company reserves the right to periodically enhance and amend website information without prior notice. We appreciate your understanding in this regard.