1200℃ low vacuum rotary CVD system with 3-channel float flowmeter O1200-60IIIC-R
1200℃ low vacuum rotary CVD system use high-purity quartz to make the furnace tube. The rotating device is air cooled flange, friction drive, and the inclination angle (0-15°) is adjustable.
Product Description
The tube furnace in this product boasts three independently controlled temperature zones, precision-regulated by a dedicated temperature control instrument. This allows for the creation of temperature gradients or extended constant temperature zones within the heating area. Each zone can be finely tuned with 30 sections for temperature rise and fall, complete with overheating and open circuit protection. Digital vacuum and mechanical pressure gauges on both sides of the furnace tube facilitate atmospheric control in the pipeline. Ideal for processes requiring the maintenance of a single grain structure, such as drying or calcining materials, the rotary tube furnace offers continuous rotary motion and atmospheric protection for uniform heating effects, ensuring an ideal treatment outcome.
The 1200℃ low vacuum rotary Chemical Vapor Deposition (CVD) system is a robust setup with a maximum power of 4.5kW. The high-purity quartz tube, featuring variable diameters (60mm at both ends and 100mm in the middle) and an overall length of 1400mm, incorporates a three-zone heating mechanism. Each heating zone spans 200mm, operating within a temperature range of 0 to 1100℃ with a precise temperature control accuracy of ±1℃. The system allows users to choose between a 30 or 50 segment program temperature control mode, displayed on a clear digital interface. Sealing is achieved with a 304 stainless steel vacuum flange, and the vacuum level is consistently maintained at 4.4E-3Pa. The system, operating on AC at 220V and 50/60Hz, offers an inclination angle between 0 to 15 degrees and a variable rotating speed ranging from 0 to 20 rpm.
The gas supply system (model 3F) is a three-channel configuration with a gas float flowmeter, supporting different gases. Channel A accommodates 0 to 100ml of H2 gas, Channel B ranges from 16 to 160ml of N2 gas, and Channel C ranges from 25 to 250ml for Ar gas, with a gas flow measurement accuracy of ±2.0%. The system can withstand pipe pressure resistance up to 3MPa, with connecting pipes and gas channels made of durable 304 stainless steel. Needle valves ensure precise control, and the interface specification uses 1/4" ferrule connectors for gas inlet and outlet. The exhaust system, featuring a mechanical pump and a rotary vane pump, achieves a pumping rate of 1.1L/s with an ultimate vacuum level of 1.0E-1Pa. The exhaust system operates on AC at 220V and 50/60Hz and connects through a KF16 exhaust interface.
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